Micro-Electro-Mechanical (MEMS) Lateral Switch Topology

Reference #:

2001-005

Inventors/Contributors

Barry K. Gilbert, Ph.D., Timothy M. Schaefer

Description

A Micro-Electro-mechanical System Lateral Switch. The switch includes a complaint spring that supports a contact shuttle for movement in a lateral direction generally parallel to the substrate and biases the contact shuttle to a normally open switch state position. A plurality of moving electrodes are coupled to the electrically isolated contact shuttle. A plurality of fixed electrodes are interleaved with the moving electrodes. Electrostatic forces developed between the fixed and moving electrodes cause the contact shuttle to move to a closed switch state position in response to the application of the actuation voltage. Key Characteristics: Contact Shuttle Isolation: 30dB > up to 10 GHz. Fast Actuation Speed: < 10 microseconds. Low Activation Voltage: < 3 Vdc. Technology Status: Soft/Firm - Low speed version implemented in MUMPS 3-layer Polysilicon Process.

Patent Status

	U.S. Patent Number 6,798,315 Issued September 28, 2004